Alexey Kovalgin

University of Twente - Enschede / Netherlands

Engineering & Technology / Metallurgical & Materials Engineering

AD Scientific Index ID: 1766903

Universiteit Twente

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University of Twente

Alexey Kovalgin's MOST POPULAR ARTICLES

1-) Semiconductor processing apparatus with compact free radical source US Patent App. 13/918,094, 2013

2-) Selective deposition of tungsten US Patent 10,714,385, 2020

3-) Selective deposition of tungsten US Patent App. 16/926,192, 2020

4-) CO interaction with the surface of thermally activated CaO and MgO Journal of Catalysis 123 (2), 396-416, 1990

5-) Systematic TLM measurements of NiSi and PtSi specific contact resistance to n-and p-type Si in a broad doping range IEEE electron device letters 29 (4), 378-381, 2008

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