Christian Dussarrat

Air Liquide - Paris / France

Engineering & Technology / Electrical & Electronic Engineering

AD Scientific Index ID: 4966282

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Christian Dussarrat's MOST POPULAR ARTICLES

1-) Method of forming dielectric films, new precursors and their use in semiconductor manufacturing US Patent 8,668,957, 2014

2-) Organosilane precursors for ALD/CVD silicon-containing film applications US Patent 9,371,338, 2016

3-) Method of forming silicon oxide containing films US Patent 8,227,032, 2012

4-) Preparation of lanthanide-containing precursors and deposition of lanthanide-containing films US Patent 8,283,201, 2012

5-) Method of forming silicon-containing films US Patent App. 12/233,057, 2009

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