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G. Andrew Antonelli

G. Andrew Antonelli

Onto Innovation - / United States
Engineering & Technology / Metallurgical & Materials Engineering
AD Scientific Index ID: 4970124
person_outline G. Andrew Antonelli's MOST POPULAR ARTICLES
1-) Smooth silicon-containing films US Patent 8,709,551, 2014
2-) Remote plasma processing of interface surfaces US Patent App. 12/533,960, 2010
3-) PECVD flowable dielectric gap fill US Patent 8,557,712, 2013
4-) Cleaning of carbon-based contaminants in metal interconnects for interconnect capping applications US Patent App. 14/314,479, 2015
5-) In-situ deposition of film stacks US Patent 8,741,394, 2014