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Hui Deng (é‚“è3⁄4‰)

Hui Deng (é‚“è3⁄4‰)

Southern University of Science & Technology - Shenzhen / China
Engineering & Technology / Mechanical Engineering
AD Scientific Index ID: 99268
南方科技大学
person_outline Hui Deng (é‚“è3⁄4‰)'s MOST POPULAR ARTICLES
1-) Plasma assisted polishing of single crystal SiC for obtaining atomically flat strain-free surface CIRP annals 60 (1), 571-574, 2011
2-) Electro-chemical mechanical polishing of single-crystal SiC using CeO2 slurry Electrochemistry Communications 52, 5-8, 2015
3-) Atomic-scale flattening mechanism of 4H-SiC (0 0 0 1) in plasma assisted polishing CIRP annals 62 (1), 575-578, 2013
4-) Polishing and planarization of single crystal diamonds: state-of-the-art and perspectives International Journal of Extreme Manufacturing 3 (2), 022003, 2021
5-) Damage-free finishing of CVD-SiC by a combination of dry plasma etching and plasma-assisted polishing International Journal of Machine Tools and Manufacture 115, 38-46, 2017