AD Scientific Index
 Open Nav
Login Login Pricing & Plans Pricing & Plans
Joseph P Klesko

Joseph P Klesko

Sandia National Laboratories - New Mexico / United States
Engineering & Technology / Nanoscience and Nanotechnology
AD Scientific Index ID: 4632576
-
person_outline Joseph P Klesko's MOST POPULAR ARTICLES
1-) Low temperature thermal atomic layer deposition of cobalt metal films Chemistry of Materials 28 (3), 700-703, 2016
2-) Low Temperature, Selective Atomic Layer Deposition of Cobalt Metal Films Using Bis(1,4-di-tert-butyl-1,3-diazadienyl)cobalt and Alkylamine Precursors Chemistry of Materials 29 (17), 7458-7466, 2017
3-) Low Temperature, Selective Atomic Layer Deposition of Nickel Metal Thin Films ACS Applied Materials & Interfaces, 2018
4-) Substrate selectivity in the low temperature atomic layer deposition of cobalt metal films from bis(1,4-di-tert-butyl-1,3-diazadienyl)cobalt and formic acid Journal of Chemical Physics 146 (5), 052813, 2017
5-) Thermal atomic layer deposition of titanium films using titanium tetrachloride and 2-methyl-1,4-bis(trimethylsilyl)-2,5-cyclohexadiene or 1,4-bis(trimethylsilyl)-1,4 … Chemistry of Materials 27 (14), 4918-4921, 2015