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Keh Jeng Chang

Keh Jeng Chang

National Tsing Hua University Taiwan - Hsinchu / Taiwan
Engineering & Technology / Computer Science
AD Scientific Index ID: 349345
國立清華大學
person_outline Keh Jeng Chang's MOST POPULAR ARTICLES
1-) Method and system for extraction of parasitic interconnect impedance including inductance US Patent 6,643,831, 2003
2-) Computer-aided design methods and apparatus for multilevel interconnect technologies US Patent 5,610,833, 1997
3-) System and method for extracting parasitic impedance from an integrated circuit layout US Patent 5,901,063, 1999
4-) Use of short-loop electrical measurements for yield improvement IEEE transactions on semiconductor manufacturing 8 (2), 150-159, 1995
5-) Using a statistical metrology framework to identify systematic and random sources of die-and wafer-level ILD thickness variation in CMP processes Proceedings of International Electron Devices Meeting, 499-502, 1995