Ren-Guan Duan

Applied Materials, Inc. - Santa Clara / United States

Engineering & Technology / Metallurgical & Materials Engineering

AD Scientific Index ID: 4399991

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Applied Materials, Inc.

Ren-Guan Duan's MOST POPULAR ARTICLES

1-) Ceramic coating comprising yttrium which is resistant to a reducing plasma US Patent App. 12/072,530, 2009

2-) Plasma-resistant ceramics with controlled electrical resistivity US Patent 8,367,227, 2013

3-) Yttria-based material coated chemical vapor deposition chamber heater US Patent 9,556,507, 2017

4-) Gas distribution showerhead with coating material for semiconductor processing US Patent App. 13/011,839, 2011

5-) Erosion-resistant plasma chamber components comprising a metal base structure with an overlying thermal oxidation coating US Patent 8,129,029, 2012

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