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S Samukawa Seiji Samukawa

S Samukawa Seiji Samukawa

Tohoku University - Sendai / Japan
Engineering & Technology / Mechanical Engineering
AD Scientific Index ID: 412710
東北大学
person_outline S Samukawa Seiji Samukawa's MOST POPULAR ARTICLES
1-) The 2017 Plasma Roadmap: Low temperature plasma science and technology Journal of Physics D: Applied Physics 50 (32), 323001, 2017
2-) The 2012 plasma roadmap Journal of Physics D: Applied Physics 45 (25), 253001, 2012
3-) The 2022 Plasma Roadmap: low temperature plasma science and technology Journal of Physics D: Applied Physics 55 (37), 373001, 2022
4-) Plasma processing method and equipment used therefor US Patent 5,827,435, 1998
5-) Neutral particle beam processing apparatus US Patent 6,861,642, 2005