Saurabh Garg

University of Chicago Booth School of Business - Chicago / United States

Engineering & Technology / Computer Science

AD Scientific Index ID: 1772885

Chicago Booth

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University of Chicago Booth School of Business

Saurabh Garg's MOST POPULAR ARTICLES

1-) RPS assisted RF plasma source for semiconductor processing US Patent 9,502,218, 2016

2-) Semiconductor processing with DC assisted RF power for improved control US Patent 9,373,517, 2016

3-) Chemical control features in wafer process equipment US Patent 9,132,436, 2015

4-) Dry-etch selectivity US Patent 8,969,212, 2015

5-) Semiconductor processing with DC assisted RF power for improved control US Patent 10,032,606, 2018

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