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Siddhartha Panda

Siddhartha Panda

Indian Institute of Technology IIT Kanpur - Kanpur / India
Engineering & Technology / Chemical Engineering
AD Scientific Index ID: 419551
भारतीय प्रौद्योगिकी संस्थान कानपुर
person_outline Siddhartha Panda's MOST POPULAR ARTICLES
1-) Silicon nitride etching methods US Patent 7,288,482, 2007
2-) Silicon nitride etching methods US Patent 7,288,482, 2007
3-) Dual stress liner for high performance sub-45nm gate length SOI CMOS manufacturing IEDM Technical Digest. IEEE International Electron Devices Meeting, 2004 …, 2004
4-) Modeling the synthesis of aluminum particles by evaporation-condensation in an aerosol flow reactor Nanostructured Materials 5 (7-8), 755-767, 1995
5-) Anisotropic etching of polymer films by high energy (∼ 100s of eV) oxygen atom neutral beams Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 19 (2 …, 2001