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Tahsin Faraz

Tahsin Faraz

Eindhoven University of Technology - Eindhoven / Netherlands
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AD Scientific Index ID: 4428977
Technische Universiteit Eindhoven
person_outline Tahsin Faraz's MOST POPULAR ARTICLES
1-) Status and prospects of plasma-assisted atomic layer deposition Journal of Vacuum Science & Technology A 37 (3), 2019
2-) Atomic Layer Etching: What Can We Learn from Atomic Layer Deposition? ECS Journal of Solid State Science and Technology 4 (6), N5023-N5032, 2015
3-) Tuning material properties of oxides and nitrides by substrate biasing during plasma-enhanced atomic layer deposition on planar and 3D substrate topographies ACS applied materials & interfaces 10 (15), 13158-13180, 2018
4-) Energetic ions during plasma-enhanced atomic layer deposition and their role in tailoring material properties Plasma Sources Science and Technology 28 (2), 024002, 2019
5-) Area-selective atomic layer deposition of TiN using aromatic inhibitor molecules for metal/dielectric selectivity Chemistry of Materials 32 (18), 7788-7795, 2020