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Liu Sumeng

Liu Sumeng

Shanghai Jiao Tong University - Shanghai / China
Natural Sciences / Chemical Sciences
AD Scientific Index ID: 5856350
上海交通大学 SJTU
person_outline Liu Sumeng's MOST POPULAR ARTICLES
1-) Area selective CVD of metallic films from molybdenum, iron, and ruthenium carbonyl precursors: Use of ammonia to inhibit nucleation on oxide surfaces Journal of Vacuum Science & Technology A 36 (4), 2018
2-) Removal of Tin from Extreme Ultraviolet Collector Optics by In-Situ Hydrogen Plasma Etching Plasma Chemistry and Plasma Processing 38 (1), 223-245, 2018
3-) Platinum (II) Di-ω-alkenyl Complexes as “Slow-Release” Precatalysts for Heat-Triggered Olefin Hydrosilylation Journal of the American Chemical Society 143 (42), 17492-17509, 2021
4-) Low Temperature Chemical Vapor Deposition of Superconducting Vanadium Nitride Thin Films Journal of Vacuum Science & Technology A 37 (3), 031509, 2019
5-) Low temperature chemical vapor deposition of superconducting molybdenum carbonitride thin films Journal of Vacuum Science & Technology A 37 (2), 2019